Highly Sensitive Interdigitated Capacitive Humidity Sensors Based on Sponge-Like Nanoporous PVDF/LiCl Composite for Real-Time Monitoring.

In this study, a sponge-like poly(vinylidene fluoride) (PVDF)/lithium chloride (LiCl) nanocomposite-entrenched interdigitated capacitive (IDC) sensor was developed for real-time humidity-sensing applications. Here, we demonstrated a sponge-like nanoporous structure ranging from 200 nm to 2 µm size holes, the PVDF/LiCl structure fabricated on an interdigitated capacitor (IDC) electrode functioning as a high-performance sensor because of the presence of ionized LiCl. The nanoporous PVDF/LiCl composite-based humidity sensor exhibited a high sensitivity of 12.6 nF/% relative humidity (RH), a linearity of 0.990, and a low hysteresis of 2.6% in the range of 25-95% RH. The composite film exhibited a response time of 17.7 s, a recovery time of 21 s, and an intensified increase of 8.02 nF/s (a decrease of 6.7 nF/s). The sensor designed demonstrates ultra-high sensing characteristics with 10 times higher sensitivity, i.e., 12.678.96 pF/%RH as compared to other polymer-based composite humidity sensors. Owing to the sensing performance and portability, the proposed nanoporous PVDF/LiCl composite-based IDC sensor is expected to be a promising platform for a wide range of humidity-sensing applications, including real-time breath monitoring and non-contact sensing.

Fabrication of Large-Area Mullite-Cordierite Composite Substrates for Semiconductor Probe Cards and Enhancement of Their Reliability.

This work aims to fabricate a large-area ceramic substrate for the application of probe cards. Mullite (M) and cordierite (C), which both have a low thermal expansion coefficient, excellent resistance to thermal shock, and high durability, were selected as starting powders. The mullite-cordierite composites were produced through different composition ratios of starting powders (M:C = 100:0, M:C = 90:10, M:C = 70:30, M:C = 50:50, M:C = 30:70, and M:C = 0:100). The effects of composition ratio and sintering temperature on the density, porosity, thermal expansion coefficient, and flexural strength of the mullite-cordierite composite pellets were investigated. The results showed that the mullite-cordierite composite pellet containing 70 wt% mullite and 30 wt% cordierite sintered at 1350 °C performed exceptionally well. Based on these findings, a large-area mullite-cordierite composite substrate with a diameter of 320 mm for use in semiconductor probe cards was successfully fabricated. Additionally, the changes in sheet resistance and flexural strength were measured to determine the effect of the environmental tests on the large-area substrate such as damp heat and thermal shock. The results indicated that the mullite-cordierite composite substrate was extremely reliable and durable.